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Ta-lined tungsten plugs for transistor-local hydrogen gathering
Ta-lined tungsten plugs for transistor-local hydrogen gathering
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机译:钽衬钨塞,用于晶体管局部氢收集
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摘要
The present electronic device includes a dielectric body having an opening therein. A tantalum layer is provided in the opening of the dielectric body, the layer having the characteristic of absorbing hydrogen with decrease in temperature, and releasing hydrogen with increase in temperature. A conductive tungsten plug is provided on the layer in the opening.
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