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METHOD FOR PRODUCING AN ELEMENT, INCLUDING A MULTIPLICITY OF NANOCYLINDERS ON A SUBSTRATE, AND USE THEREOF

机译:一种在基质上制备元素的方法,包括在多个纳米柱上的使用,并使用其

摘要

A method for producing an element including a substrate having a plurality of nanocylinders deposited thereon includes providing the substrate. The substrate is covered with a nanoporous Al2O3 membrane so as to provide a covered substrate. The covered substrate is alternately vapor-deposited, at a vapor-deposition temperatures from 250° C. to 400° C., with atoms of a magnetic element and atoms of a non-magnetic element so as to provide the plurality of nanocylinders. Each nanocylinder includes at least four superposed layers including, alternatively, the atoms of the magnetic element and the atoms of the non-magnetic element. The nanoporous Al2O3 membrane is then removed so that the nanocylinders remain on the substrate.
机译:用于生产包括其上沉积有多个纳米圆柱体的基板的元件的方法包括提供基板。用纳米孔Al 2 O 3 膜覆盖基底,以提供覆盖的基底。在250℃至400℃的气相沉积温度下,将被覆盖的基板与磁性元素的原子和非磁性元素的原子交替气相沉积,以提供多个纳米圆柱体。每个纳米圆柱体包括至少四个叠置的层,其交替地包括磁性元素的原子和非磁性元素的原子。然后除去纳米多孔的Al 2 O 3 膜,使纳米圆柱体保留在基底上。

著录项

  • 公开/公告号US2009263595A1

    专利类型

  • 公开/公告日2009-10-22

    原文格式PDF

  • 申请/专利权人 JENS ELLRICH;LEI YONG;HORST HAHN;

    申请/专利号US20070300557

  • 发明设计人 HORST HAHN;JENS ELLRICH;LEI YONG;

    申请日2007-04-28

  • 分类号C23C14/14;B05D5/12;

  • 国家 US

  • 入库时间 2022-08-21 19:35:51

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