首页> 外国专利> METHOD FOR PRODUCING DIELECTRIC FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT, METHOD FOR PRODUCING LIQUID-JET HEAD, DIELECTRIC FILM, PIEZOELECTRIC ELEMENT, AND LIQUID-JET APPARATUS

METHOD FOR PRODUCING DIELECTRIC FILM, METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT, METHOD FOR PRODUCING LIQUID-JET HEAD, DIELECTRIC FILM, PIEZOELECTRIC ELEMENT, AND LIQUID-JET APPARATUS

机译:介电膜的制造方法,压电元件的制造方法,液体喷射头的制造方法,介电膜,压电元件以及液体喷射的装置

摘要

A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].
机译:一种制造电介质膜的方法,包括:涂覆步骤,涂覆包含有机金属化合物的胶体溶液,所述有机金属化合物包含构成至少包含铅成分的电介质膜的金属,所述电介质膜形成电介质前体膜。干燥电介质前体膜的干燥步骤;使电介质前体膜脱脂的脱脂步骤;烧成步骤,其中,干燥步骤包括将电介质前驱体膜加热到低于作为溶剂的主要溶剂的溶剂的沸点的温度的第一干燥步骤。所述材料,并且将所述电介质前体膜在所述温度下保持一定的时间以干燥所述电介质前体膜,以及第二干燥步骤,所述第二干燥步骤是在140℃至170°C的温度范围内干燥所述电介质前体膜。脱脂工序在350℃〜450℃的脱脂温度下,以15 [℃/ sec]以上的升温速度进行,烧成工序在加热下进行。 100 [°C /秒]至150 [°C /秒]的上升速率。

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