首页>
外国专利>
Microscope and Microscope Microexamination Procedure Method for the Measurement of the Surface Profile of an Object
Microscope and Microscope Microexamination Procedure Method for the Measurement of the Surface Profile of an Object
展开▼
机译:用于测量物体表面轮廓的显微镜和显微镜显微检查程序方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention provides a microscope for measuring the surface profile of an object, including (1) an illumination module which directs illumination radiation with different wavelengths to different surface portions of the object in such a way that a predetermined object intersection length range is illuminated for every portion, and (2) a detection module which detects sample radiation of every portion successively in time. Wherein the detection module directs the sample radiation into a detection beam path via a scanner and confocally images another wavelength of the sample radiation in a plane for every intersection length to be detected. The detection module also detects the intensity of the confocally imaged sample radiation in a wavelength-dependent manner and derives therefrom the position of the corresponding surface portion of the object. Wherein the detection module has a color module arranged between the scanner and the plane, through which the sample radiation passes.
展开▼