MICROSCOPE AND MICROSCOPE MICROEXAMINATION PROCEDURE METHOD FOR THE MEASUREMENT OF THE SURFACE PROFILE OF AN OBJECT

摘要

A microscope for measuring the surface profile of an object (OB) is made available with a light module that directs the light rays with different wavelengths onto various surface sections of an object (OB) in such a way that each section of a predetermined section of the area of the object is illuminated, whereby sample rays are generated by the reciprocal reaction between the light ray and the object (OB), and a detection module, that chronologically and sequentially detects sample rays by guiding the sample rays into a detection radiation detection path by means of a scanner (5) and then displays a different wavelength of the sample ray confocally on one plane for each back focus section of the object cross section of the sample ray guided into the detection radiation detection path, detects the intensity of the confocally displayed wavelength-dependent sample ray and derives the position of the relevant surface section of the object (OB), whereby the detection module is equipped with a color module (9) with adjustable longitudinal color error, which is arranged between the scanner (5) and the plane, and which is passed through by the sample ray so that changes in the longitudinal color error of the detected cross back focus sections can be adjusted.