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THIN FILM TRANSISTOR, INTEGRATED CIRCUIT, LIQUID CRYSTAL DISPLAY, METHOD OF PRODUCING THIN FILM TRANSISTOR, AND METHOD OF EXPOSURE USING ATTENUATED TYPE MASK
THIN FILM TRANSISTOR, INTEGRATED CIRCUIT, LIQUID CRYSTAL DISPLAY, METHOD OF PRODUCING THIN FILM TRANSISTOR, AND METHOD OF EXPOSURE USING ATTENUATED TYPE MASK
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机译:薄膜晶体管,集成电路,液晶显示,薄膜晶体管的制造方法以及使用衰减型面膜的曝光方法
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摘要
A method of producing a thin film transistor comprises irradiating a resist on a glass base plate with a ray from a light source through a mask and, thereafter, developing the resist to form contact holes, using an i-ray as the ray.
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