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OPTICAL SCANNING PROBE, OPTICAL SCANNING PROBE DEVICE AND METHOD FOR CONTROLLING THE OPTICAL SCANNING PROBE
OPTICAL SCANNING PROBE, OPTICAL SCANNING PROBE DEVICE AND METHOD FOR CONTROLLING THE OPTICAL SCANNING PROBE
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机译:光学扫描探针,光学扫描探针装置和用于控制光学扫描探针的方法
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摘要
An optical scanning probe is provided and includes an optical scanning element which scans a subject with light, and a signal switching section for switching a drive signal for making the optical scanning element perform optical scanning. The optical scanning element includes a movable portion having a micro mirror which is displaced in a first rotating direction and a second rotating direction, and first and second drivers which apply physical acting forces to the movable portion. The signal switching section has a function for switching a driving preparation signal for attracting the movable portion in either the first rotating direction or the second rotating direction into a scanning drive signal for attracting the movable portion in the first rotating direction and the second rotating direction alternately. The maximum voltage of the driving preparation signal is set value to be higher than the maximum voltage of the scanning drive signal.
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