首页> 外国专利> OPTICAL SCANNING PROBE, OPTICAL SCANNING PROBE DEVICE AND METHOD FOR CONTROLLING THE OPTICAL SCANNING PROBE

OPTICAL SCANNING PROBE, OPTICAL SCANNING PROBE DEVICE AND METHOD FOR CONTROLLING THE OPTICAL SCANNING PROBE

机译:光学扫描探针,光学扫描探针装置和用于控制光学扫描探针的方法

摘要

An optical scanning probe is provided and includes an optical scanning element which scans a subject with light, and a signal switching section for switching a drive signal for making the optical scanning element perform optical scanning. The optical scanning element includes a movable portion having a micro mirror which is displaced in a first rotating direction and a second rotating direction, and first and second drivers which apply physical acting forces to the movable portion. The signal switching section has a function for switching a driving preparation signal for attracting the movable portion in either the first rotating direction or the second rotating direction into a scanning drive signal for attracting the movable portion in the first rotating direction and the second rotating direction alternately. The maximum voltage of the driving preparation signal is set value to be higher than the maximum voltage of the scanning drive signal.
机译:提供一种光学扫描探针,该光学扫描探针包括:光学扫描元件,该光学扫描元件用光扫描被检体;以及信号切换部,该信号切换部用于切换用于使该光学扫描元件进行光学扫描的驱动信号。光学扫描元件包括:可移动部分,其具有在第一旋转方向和第二旋转方向上移位的微镜;以及第一和第二驱动器,其向该可移动部分施加物理作用力。信号切换部具有以下功能:将在第一旋转方向或第二旋转方向上吸引可动部的驱动准备信号交替地切换为在第一旋转方向和第二旋转方向上吸引可动部的扫描驱动信号。 。驱动准备信号的最大电压被设置为高于扫描驱动信号的最大电压。

著录项

  • 公开/公告号US2009057543A1

    专利类型

  • 公开/公告日2009-03-05

    原文格式PDF

  • 申请/专利权人 SHINYA OGIKUBO;

    申请/专利号US20080204559

  • 发明设计人 SHINYA OGIKUBO;

    申请日2008-09-04

  • 分类号G02B26/10;G02B26/08;

  • 国家 US

  • 入库时间 2022-08-21 19:31:54

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