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Etching systems and processing gas specie modulation
Etching systems and processing gas specie modulation
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机译:蚀刻系统和气体种类调制
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摘要
A method and system for etching a substrate control selectivity of the etch process by modulating the gas specie of the reactants. The gas specie selectively form and etch a buffer layer that protects underlying etch stop materials thereby providing highly selective etch processes.
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