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MULTI-TIME PROGRAMMABLE MEMORY AND METHOD OF MANUFACTURING THE SAME
MULTI-TIME PROGRAMMABLE MEMORY AND METHOD OF MANUFACTURING THE SAME
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机译:多次可编程存储器及其制造方法
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摘要
A multi-time programmable (MTP) memory includes a tunneling dielectric layer, a floating gate, an inter-gate dielectric layer and a control gate. The tunneling dielectric layer is disposed on a substrate. The floating gate is disposed on the tunneling dielectric layer. The inter-gate dielectric layer is disposed on the floating gate, and a thickness of the inter-gate dielectric layer at edges of the floating gate is larger than a thickness of the inter-gate dielectric layer in a central portion of the floating gate. The control gate is disposed on the inter-gate dielectric layer.
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