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Electric field emission device having a triode structure fabricated by using an anodic oxidation process and method for fabricating same
Electric field emission device having a triode structure fabricated by using an anodic oxidation process and method for fabricating same
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机译:具有通过阳极氧化工艺制造的三极管结构的电场发射装置及其制造方法
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摘要
An electric field emission device having a triode structure is fabricated by using an anodic oxidation process. The device includes a supporting substrate, a bottom electrode layer to be used as an cathode electrode of the device, a gate insulating layer having a plurality of first sub-micro holes, a gate electrode layer having a plurality of second sub-micro holes connecting to the first sub-micro holes, an anode insulating layer having a plurality of third sub-micro holes connecting to the second sub-micro holes, a top electrode layer for hermetically sealing the device, the top electrode layer being used as an anode of the device and a plurality of emitters formed in the first sub-micro holes. The emitters are formed so as to come into as close contact as possible to the electrodes of the device, which results in decreasing a driving voltage.
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