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Methods and systems of enhancing stepper alignment signals and metrology alignment target signals
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals
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机译:增强步进对准信号和计量对准目标信号的方法和系统
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摘要
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.
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