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Pressure sensor comprising an elastic sensor layer with a microstructured surface

机译:压力传感器包括具有微结构化表面的弹性传感器层

摘要

Disclosed is a pressure sensor comprising sensor layers (12, 14) which are made of an elastic, resistive material and are applied to a polymer film that is not represented. (22) embodies a spacer that is coated with an adhesive. One sensor layer (14) is provided with a microstructured surface encompassing spherical structures (20) within an active zone (16). The compression path amounts to 10 micrometers at an extension R of the structures of 50 micrometers. The structures (20) are large compared with a certain surface roughness. The inventive pressure sensor is produced by injection molding, etching, embossing, or by of an electron beam technique or laser beam technique. Disclosed are variations thereof, which function differently.
机译:公开了一种压力传感器,其包括由弹性的电阻材料制成的传感器层(12、14),该传感器层被施加到未示出的聚合物膜上。 (22)体现了涂覆有粘合剂的垫片。一个传感器层(14)设置有微结构化的表面,该微结构化的表面在有源区(16)内包含球形结构(20)。在50微米的结构的延伸R处,压缩路径总计为10微米。与一定的表面粗糙度相比,结构(20)较大。本发明的压力传感器通过注模,蚀刻,压花或通过电子束技术或激光束技术来生产。公开了其变体,其功能不同。

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