Non-contact holder device and non-contact holding and conveying device

摘要

A non-contact holder includes: a body 2 having an ejection recess 3 having an ejection opening 3b from which a fluid is ejected and a tapered surface 3c gradually diverging toward the ejection opening; discharge ports 10 provided at positions adjacent to the tapered surface of the ejection recess of the body to discharge the fluid along the tapered surface in the axial direction; a fluid supply channel 7 connected to the discharge ports to supply the fluid; radial flow guides 11 formed on the tapered surface of the ejection recess to guide the flow of the fluid discharged from the discharge ports radially outward from the center of the ejection recess; and a flat end surface 4 formed integrally with the outer edge of the body around the ejection opening and opposed to the surface of a workpiece 5 opposing to the ejection opening to guide the flow of the fluid to the outside of the opposite surface of the workpiece 5. The single non-contact holder having the above structure can hold an object to be held, such as a workpiece, with less noise and lower cost without the rotation of the object.