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Apparatus and methods for improving the stability of RF power delivery to a plasma load
Apparatus and methods for improving the stability of RF power delivery to a plasma load
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机译:用于改善向等离子负载的射频功率输送的稳定性的装置和方法
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摘要
Methods for improving the stability of RF power delivery to a plasma load are disclosed. The method includes adding an RF resistor and/or a power attenuator at one of many specific locations in the RF power system to lower the impedance derivatives while keeping the matching circuit substantially in tune with the RF transmission line.
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