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Lithographic and measurement techniques using the optical properties of biaxial crystals
Lithographic and measurement techniques using the optical properties of biaxial crystals
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机译:利用双轴晶体光学特性的光刻和测量技术
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摘要
A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and transform the image of the optical feature to a circular ring structure. The position of the optical feature is then calculated by locating a center point associated with the circular ring structure.
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