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Manufacturing method of tuning-fork type quartz crystal resonator

机译:音叉型石英谐振器的制造方法

摘要

There is disclosed a manufacturing method of a tuning-fork type quartz crystal resonator, in which a simple step can just be added to the existing manufacturing process to prevent generation of short-circuit at a crotch portion and largely improve yield. On a quartz crystal wafer, a metal film is formed on a quartz crystal substrate processed into a tuning-fork form by evaporation or sputtering, the metal film is patterned into desired electrode and wiring line shapes by photolithography/etching, and then a crotch portion 30 is irradiated with laser from a direction substantially vertical to a wafer surface to remove a non-etched metal film portion in the manufacturing method of the tuning-fork type quartz crystal resonator.
机译:公开了一种音叉型石英晶体谐振器的制造方法,其中,只需在现有的制造过程中增加一个简单的步骤即可防止在rot部产生短路并大大提高成品率。在石英晶片上,在通过蒸发或溅射加工成音叉形式的石英基板上形成金属膜,通过光刻/蚀刻将金属膜构图成期望的电极和配线形状,然后形成portion部。在音叉型石英晶体谐振器的制造方法中,从基本上垂直于晶片表面的方向对 30 进行激光照射,以去除未蚀刻的金属膜部分。

著录项

  • 公开/公告号US7544464B2

    专利类型

  • 公开/公告日2009-06-09

    原文格式PDF

  • 申请/专利权人 RYOICHI ICHIKAWA;

    申请/专利号US20070907263

  • 发明设计人 RYOICHI ICHIKAWA;

    申请日2007-10-10

  • 分类号H03H3/02;H03B5/32;

  • 国家 US

  • 入库时间 2022-08-21 19:29:18

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