Method for forming nanostructured carbons, nanostructured carbons and a substrate having nanostructured carbons formed thereby

摘要

A method for forming nanostructured carbons comprising the steps of: generating a plasma by supplying at least a discharge gas between opposing electrodes and applying a high-frequency voltage between the electrodes under an approximately atmospheric pressure; existing a material gas for forming the nanostructured carbons with the plasma to generate an activated material gas; and exposing a substrate to the activated material gas.