A method of predicting the lifetime reliability of an integrated circuit device with respect to one or more failure mechanisms includes breaking down the integrated circuit device into structures; breaking down each structure into elements and devices; evaluating each device to determine whether the device is vulnerable to the failure mechanisms and eliminating devices determined not to be vulnerable; estimating, for each determined vulnerable device, the impact of a failure of the device on the functionality of the specific element associated therewith, and classifying the failure into a fatal failure or a non-fatal failure, wherein a fatal failure causes the element employing the given device to fail; determining, for those devices whose failures are fatal, an effective stress degree and/or time; determining one or more of a failure rate and a probability of fatal failure for the devices, and aggregating the same across the structures and the failure mechanisms.
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