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Magnetic thin film sensor based on the extraordinary Hall effect

机译:基于非凡霍尔效应的磁性薄膜传感器

摘要

A magnetic field sensor, including an insulating substrate and a conductive thin film deposited on the substrate. The thin film consists of a material having an extraordinary Hall coefficient, the thin film also has a resistivity and a film thickness no greater. than a threshold thickness at which the resistivity is substantially equal to 150% of a bulk resistivity of the material. The sensor also includes conductors coupled to the thin film for injecting a current into the film and measuring a voltage generated across the thin film responsive to the injected current. Devices having other types of thin films, including homogeneous and non-homogeneous films, the films having enhanced extraordinary Hall coefficients, are also provided.
机译:一种磁场传感器,包括绝缘基板和沉积在该基板上的导电薄膜。该薄膜由具有非凡霍尔系数的材料组成,该薄膜还具有电阻率并且膜厚度不大于该膜厚度。电阻率基本上等于该材料的体电阻率的150%的阈值厚度。该传感器还包括耦合到薄膜的导体,用于将电流注入薄膜并响应于注入的电流测量薄膜两端产生的电压。还提供了具有其他类型的薄膜的装置,包括均质膜和非均质膜,这些膜具有增强的非常大的霍尔系数。

著录项

  • 公开/公告号US7463447B2

    专利类型

  • 公开/公告日2008-12-09

    原文格式PDF

  • 申请/专利权人 ALEXANDER GERBER;

    申请/专利号US20060498565

  • 发明设计人 ALEXANDER GERBER;

    申请日2006-08-03

  • 分类号G11B5/37;

  • 国家 US

  • 入库时间 2022-08-21 19:28:42

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