Apparatus and process for annealing a multilayer body, and Multilayer body of this type The invention proposes a process for annealing large- area multilayer bodies by supplying a quantity of energy at an annealing rate of at least 1°C/s. To suppress temperature inhomogeneities during the annealing, different partial quantities of the quantity of energy are supplied to the layers of the multilayer body with a local and temporal resolution. The multi- layer body is annealed in a container which has a base and a cover made from glass-ceramic. The process is used to produce a thin-film solar module.
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