Method and device for drilling holes co2 laser pulses.

摘要

Method for drilling holes with CO 2 laser pulses using a laser (1) CO2, characterized by the following steps: a) transformation of linearly polarized laser radiation CO 2 in a circularly polarized radiation; b) insertion of optical elements for adapting the diameter and divergence of the radiation beam; c) rotation of the intensity profile of the radiation beam about its axis of radiation; d) rotation of the entire ray bundle around the system axis with a distance and a defined angle, but freely adjustable, between the axis of the radiation beam and the axis of the system, such that, during subsequent beam focusing radiation and formed by the focusing optics (12) onto the desired site of machining, it is ensured that, on the one hand, all radiation portions meet in the focal spot (26) and on the other hand, divergence of the radiation, after passing through the spot focus (26) is adapted so that the desired form of hole originates, e) effected the formation of radiation pulses or pulse sequences of rotation from the radiation (2) the laser (1) CO2 outside the laser resonator; f) blowing into the vicinity of the focal spot (26) with a working gas and protection; g) suppressed reattachment radiation between the workpiece and the CO2 laser via a decoupling unit (4) selective wavelength; h) protecting constructional elements of the drill hole opposite component against undesired actions of the residual radiation passing through the drill hole by a liquid flowing in the underside of the machined workpiece.