首页> 外国专利> APPARATUS AND METHOD FOR OBTAINING AND PROVIDING IMAGING INFORMATION ASSOCIATED WITH AT LEAST ONE PORTION OF A SAMPLE AND EFFECTING SUCH PORTION(S)

APPARATUS AND METHOD FOR OBTAINING AND PROVIDING IMAGING INFORMATION ASSOCIATED WITH AT LEAST ONE PORTION OF A SAMPLE AND EFFECTING SUCH PORTION(S)

机译:获得和提供与样本的至少一部分有关并影响该部分的成像信息的设备和方法

摘要

Exemplary apparatus and process can be provided for imaging information associated with at least one portion of a sample. For example, (i) at least two first different wavelengths of at least one first electro-magnetic radiation can be provided within a first wavelength range provided on the portion of the sample so as to determine at least one first transverse location of the portion, and (ii) at least two second different wavelengths of at least one second electro-magnetic radiation are provided within a second wavelength range provided on the portion so as to determine at least one second transverse location of the portion. The first and second ranges can east partially overlap on the portion. Further, a relative phase between at least one third electro-magnetic radiation electro-magnetic radiation being returned from the sample and at least one fourth electro-magnetic radiation returned from a reference can be obtained to determine a relative depth location of the portion. First information of the portion based on the first transverse location and the relative depth location, and second information of the portion based on the second transverse location and the relative depth location can be obtained. The imaging information may include the first and second information.
机译:可以提供示例性的设备和过程,用于对与样本的至少一部分相关联的信息进行成像。例如,(i)可以在样品的该部分上提供的第一波长范围内提供至少一个第一电磁辐射的至少两个第一不同波长,以便确定该部分的至少一个第一横向位置, (ii)在该部分上提供的第二波长范围内提供至少一个第二电磁辐射的至少两个第二不同波长,以便确定该部分的至少一个第二横向位置。第一范围和第二范围可以在该部分上东部部分重叠。此外,可以获得从样品返回的至少一个第三电磁辐射电磁辐射与从参考物返回的至少一个第四电磁辐射之间的相对相位,以确定该部分的相对深度位置。可以获得基于第一横向位置和相对深度位置的部分的第一信息,以及基于第二横向位置和相对深度位置的部分的第二信息。成像信息可以包括第一信息和第二信息。

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