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SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF)
SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF)
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机译:使用可调调制传递函数(MTF)进行传感的系统和方法
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摘要
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as abasing and maintaining contrast.
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