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PROCESS FOR PRODUCTION OF CARBON NANOTUBE AGGREGATES, CARBON NANOTUBE AGGREGATES, CATALYST PARTICLE DISPERSION MEMBRANE, ELECTRON EMITTERS, AND FIELD EMISSION DISPLAYS
PROCESS FOR PRODUCTION OF CARBON NANOTUBE AGGREGATES, CARBON NANOTUBE AGGREGATES, CATALYST PARTICLE DISPERSION MEMBRANE, ELECTRON EMITTERS, AND FIELD EMISSION DISPLAYS
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机译:碳纳米管聚集体,碳纳米管聚集体,催化剂颗粒分散膜,电子发射体和场发射显示器的生产过程
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摘要
A method for producing a carbon nanotube assembly, the method controlling a growth density of carbon nanotubes on a substrate, includes: a step for preparing a catalyst particle dispersed film-formed substrate including a catalyst particle dispersed film in which metal catalyst particles having a predetermined particle diameter are dispersed among barrier particles; and a thermal CVD step for growing carbon nanotubes from the metal catalyst particles serving as starting points by heat decomposition of an organic compound vapor.
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