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POLYMER-BASED ELECTROSPRAY NOZZLE FOR MASS SPECTROMETRY
POLYMER-BASED ELECTROSPRAY NOZZLE FOR MASS SPECTROMETRY
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机译:基于聚合物的质谱电喷雾喷嘴
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摘要
A MEMS device with an overhanging 'polymer' capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.
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