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CYCLIC ERROR REDUCTION IN AVERAGE INTERFEROMETRIC POSITION MEASUREMENTS
CYCLIC ERROR REDUCTION IN AVERAGE INTERFEROMETRIC POSITION MEASUREMENTS
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机译:平均干涉仪位置测量中的循环误差减少
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摘要
An initial interferometric position measurement of the stage (120) is averaged with at least one additional measurement corresponding to a displacement of the stage from its initial position. The displacements are selected to reduce the overall cyclic error contribution to an average position measurement.
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