首页> 外国专利> METHOD AND APPARATUS FOR MEASURING BANDWIDTH OF AN OPTICAL SPECTRUM OUTPUT OF A VERY SMALL WAVELENGTH VERY NARROW BANDWIDTH HIGH POWER LASER

METHOD AND APPARATUS FOR MEASURING BANDWIDTH OF AN OPTICAL SPECTRUM OUTPUT OF A VERY SMALL WAVELENGTH VERY NARROW BANDWIDTH HIGH POWER LASER

机译:测量小波长,窄带宽,大功率激光的光谱输出带宽的方法和装置

摘要

An apparatus (10) and method for controlling a laser System (12) is disclosed with a spectrometer (24, 30) having an optical bandwidth measuring unit (24) such as an etalon. The optical bandwidth measuring unit (24) outputs a measured parameter (32) and a reported parameter (36) is calculated by: Reported Parameter ('RP') = A * (Measured Parameter ('MP')) + C where A and C are determined based upon calibration of the optical bandwidth measuring unit (24) MP response for light of known valued of RP
机译:公开了一种用于控制激光系统(12)的设备(10)和方法,其具有具有诸如标准具的光带宽测量单元(24)的光谱仪(24、30)。光带宽测量单元(24)输出测量参数(32),并通过以下公式计算报告参数(36):报告参数('RP')= A *(测量参数('MP'))+ C,其中A和C是根据光带宽测量单元(24)的校准确定的,对于已知值RP的光的MP响应

著录项

  • 公开/公告号EP1649243A4

    专利类型

  • 公开/公告日2009-08-26

    原文格式PDF

  • 申请/专利权人 CYMER INC.;

    申请/专利号EP20040776917

  • 发明设计人 RAFAC ROBERT J.;

    申请日2004-06-14

  • 分类号G02B9/02;G01J1/42;G01J3/02;G01J3/28;G01J3/45;G01J9/00;H01S3/13;H01S3/225;

  • 国家 EP

  • 入库时间 2022-08-21 19:18:23

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号