SECONDARY ION MASS SPECTROSCOPY (SIMS) WITH POLYATOMIC PRIMARY ION BEAM, WHICH IS DIRECTED AT A SURFACE COATED WITH CAESIUM

摘要

Described is a method for analysis of a solid sample and, in particular, for analysis of the material composition and distribution in or on a solid surface. The surface to be analysed is covered with caesium, at least partially and/or in regions, and the surface is irradiated with an analysis beam which contains predominantly or exclusively polyatomic ions with at least 3 atoms per ion. The secondary ions which are produced are then analysed on caesium compound.