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Phase-diversity wavefront sensor

机译:相分集波前传感器

摘要

A measuring apparatus for determining data relating to the shape of an input radiation wavefront, where the wavefront shape is describable at a pre-determined location in an optical system. The apparatus comprises aberration means (27, 39, 61, 77), the shape of which is defined by a filter function; and detection means (23) having a radiation sensitive surface capable of detecting the intensity of incident radiation on the surface, the detection means being coupled to an output device (31, 49, 69) that provides an output signal that provides a measure of the intensity of the incident radiation. The aberration means is configured to act on an input wavefront to produce first and second output radiation signals, and the filter function has a real part and an imaginary part, the real and imaginary parts both having even symmetry or both having odd symmetry.
机译:一种用于确定与输入辐射波阵面的形状有关的数据的测量设备,其中该波阵面的形状可描述在光学系统中的预定位置。该设备包括像差装置(27、39、61、77),其形状由滤波器功能限定;具有辐射敏感表面的检测装置(23),该辐射敏感表面能够检测该表面上的入射辐射强度,该检测装置与输出装置(31、49、69)耦合,该输出装置提供输出信号,该输出信号提供对辐射强度的测量。入射辐射的强度。像差装置被配置为作用在输入波前以产生第一和第二输出辐射信号,并且滤波器功能具有实部和虚部,实部和虚部均具有偶数对称性或均具有奇数对称性。

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