首页> 外国专利> Recording drive waveform adjusting method for manufacturing master disc, master disc manufacturing method, master disc manufacturing apparatus, and master disc

Recording drive waveform adjusting method for manufacturing master disc, master disc manufacturing method, master disc manufacturing apparatus, and master disc

机译:用于制造母盘的记录驱动波形调整方法,母盘制造方法,母盘制造设备和母盘

摘要

A recording drive waveform adjusting method for manufacturing a master disc is provided. The method includes the steps of forming an exposed area in an inorganic resist layer for test exposure by irradiating a master disc having the inorganic resist layer with laser light of a recording power based on a recording drive waveform according to a test recording signal; obtaining reflected-light information by irradiating the exposed area formed in the test exposure with laser light of a reproducing power; determining whether the recording drive waveform is appropriate by using the reflected-light information; and correcting the recording drive waveform if the recording drive waveform is determined to be inappropriate in the determination.
机译:提供了一种用于制造母盘的记录驱动波形调整方法。该方法包括以下步骤:根据测试记录信号,通过基于记录驱动波形的记录功率的激光照射具有无机抗蚀剂层的母盘,从而在用于测试曝光的无机抗蚀剂层中形成曝光区域;以及通过用再生功率的激光照射在测试曝光中形成的曝光区域来获得反射光信息;通过使用反射光信息确定记录驱动波形是否合适;如果在确定中确定记录驱动波形不合适,则校正记录驱动波形。

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