METHOD AND APPARATUS FOR THE SPATIALLY RESOLVED DETERMINATION OF THE PHASE AND AMPLITUDE OF THE ELECTROMAGNETIC FIELD IN THE IMAGE PLANE OF AN IMAGE OF AN OBJECT

摘要

The present invention relates to the methods for the image of the phase and amplitude of electromagnetic field in the spatially resolved determining plane of delineation. The fact that this image is generated, it is that the object utilizes coherent ray illuminated and is imaged in a plane of delineation, light is measured in a spatially resolved manner in pixel in the plane of delineation by the following method, wherein needle is the intensity that each pixel determines light, is stored in picture point and picture point distributes to image. Firstly, first at least one other image is generated, wherein the phase and/or amplitude of light are modified to scheduled mode and change each image different from those other images. The image of phase object is generated from image in a spatially resolved manner in plane of delineation determination. The present invention also relates to a kind of devices for implementing this method. In this approach, the phase and/or amplitude of the light modified by object and plane in pupil plane between spatial frequency filtering.