ADJUSTING DEVICE WITH HIGH POSITION RESOLUTION, EVEN IN THE NANO- OR SUBNANOMETER RANGE

摘要

The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direction, the positions thereof being determined by high resolution sensors and the PZT-solid state actuators are in connection with a platform (2) via joints. For the compensation of position errors occurring perpendicular to the individual position, additional actuators (5) on the basis of piezoelectric single crystals are intended according to the invention. The single crystals are actuated according to stored values in an error table, wherein the respective control value results as a function of the main control axis, however with reversed gradient signs, and the additional actuators are connected to the adjusting device platform by a correcting plate (4).