DIRECT STRUCTURING OF A FUNCTIONAL PATTERN BY MEANS OF NANO-METAL PARTICLE BASED UV-CURING COLLIDE RESIN AND NANOIMPRINT

摘要

A uniform pattern formation can be formed and the process for forming pattern step can be reduced by direct structuring of functional pattern including conductivity. A step is for depositing the adhesion protection layer(9) on the master board(12) having the master pattern(12a). A step is for preparing the substrate(13) for direct-structuring the master pattern of the master board by depositing the adhesion film(10) on the upper side. A step is for spraying the nano metal particle based ultraviolet ray(UV) curing resin(11) on the adhesion protection layer of the master board. A step is for evaporating the solvent of resin by heating the resin-coated master board with the hot plate. The step is for installing the substrate and master board within the ultraviolet curing apparatus and for adhering the nano metal particle based ultraviolet ray(UV) curing resin(15) on the substrate in order to be contacted with the upper side of the master board by irradiating the ultraviolet ray. A step is for separating the nano metal particle based ultraviolet ray(UV) curing resin(15) from the master board. A step is for forming the nano metal particle based ultraviolet ray(UV) curing resin pattern on the substrate by the etching process.