forming a resist pattern with no residual layer using a soft molding method and formed of a patterned metal layer using the method how

摘要

A manufacturing method of resist pattern and manufacturing method of patterned metal layer using the same method are provided to forming the resist pattern without residue by using the soft molding method and by spraying the resist solution on the substrate or the metal layer for patterning. A manufacturing method of resist pattern without residual layer using soft molding includes the step of coating the resist solution(12) onto the substrate; the step of loading the soft stamp(13) having the groove patterned on the substrate; the step of forming the patterned resist using the soft molding method without pressure. The pressure less than N/cm^2 is applied to the soft stamp in order to form the resist patterned.