POROUS PIEZOELECTRIC CERAMICS WITH HIGHLY HYDROSTATIC FIGURE OF MERIT AND METHOD THEREOF

摘要

A manufacturing method of pore electrostrictive ceramics having excellent capacity of hydrostatic pressure is provided to control a porosity easily and to have three dimensions strong structure. A manufacturing method of pore electrostrictive ceramics having excellent capacity of hydrostatic pressure comprises steps of: dispersing the electrostrictive ceramics powder of 5 to 25 vol.% and producing uniform slurry at a temperature over melting point of a solvent; injecting the slurry into a molded unit, solidifying it, subliming the solvent and forming a pore electrostrictive ceramics precursor; and sintering the pore piezoelectricity ceramic precursor and forming the pore electrostrictive ceramics. The electrostrictive ceramics powder is Pb(Zr,Ti)O3.