DEVICE FOR SLIMMING OF PLATE, METHOD FOR SLIMMING OF PLATE, AND ASSEMBLY FOR SLIMING OF PLATE

摘要

A device for slimming of a plate, method for slimming of the plate, and assembly for sliming of the plate is provided to increase reuse rate of a liquid medicine by collecting the liquid medicine for etching. A substrate slimming apparatus(100) comprises a chamber part(110) having a support stand(118) supporting the substrate assembly(115), a chamber(112) accommodating the support stand and the substrate assembly, an etchant inlet port(126), and the etchant outlet port. A substrate slimming apparatus comprises an etchant reservoir(140) while being connected to a plurality of etchant inlet ports and etchant outlet ports through a first passage(150) and a second passage(160). A first pump(152) and a second pump(162) are installed at the first passage and the second passage between the etchant reservoir and the chamber part. A plurality of etchant inlet ports is arranged in a nozzle unit which is connected to the etchant reservoir through the first passage. The etchant inlet port is formed at the lower part of the nozzle unit, and the etchant outlet port is connected through the etchant collecting duct(128) to the second passage.