PLASMA ELECTRODE, MONITORING MODULE OF PLASMA, PLASMA APPARATUS AND ATMOSPHERIC PRESSURE PLASMA CLEANING APPARATUS INCORPORATING THE SAME

摘要

A plasma electrode, a plasma monitoring module, a plasma device including the same, and an atmospheric pressure plasma cleaning apparatus are provided to detect the discharge performance of the plasma in real time by forming a discharge hole and a plasma connection member directly connected to the plasma gas through the discharge hole. An atmospheric pressure plasma cleaning apparatus includes a power electrode(100), a ground electrode(200), a gas supply port, a discharge hole(310), a plasma connection member(320), a voltmeter(340), an operation unit(350), a display unit(360), a transfer member(400). The power electrode electrically reacts to the ground electrode and has the electrical reaction area for generating the plasma. The ground electrode is installed to be separated from the power electrode. A plurality of spray through-holes(250) which the plasma gas generated between the power electrodes permeates, is formed on the ground electrode. A discharge hole provides a stable plasma gas connection area to the plasma connection member. The plasma connection member is fixed in the power electrode and the ground electrode.