HIGHLY SENSITIVE AND FAST RESPONDING OXIDE SEMICONDUCTOR-TYPE GAS SENSOR USING HIERARCHICAL STRUCTURE AND FABRICATION METHOD THEREOF

摘要

A semiconductor type gas sensor and a manufacturing method thereof are provided to increase the response speed about the inspection gas through a hierarchical structure of including nano-pore. A semiconductor type gas sensor of high-sensitivity and the high speed reaction using hierarchical structure has a porous nano hierarchical structure. The main component is selected from a group made of SnO2, ZnO, In2O3, WO3, Fe2O3 and TiO2. The manufacturing method of the semiconductor type gas sensor comprises: a step of forming a oxide semiconductor precipitate having nano hierarchical structure by causing hydrothermal synthesis reaction of a metal precursor(S1); a step of washing precipitate and drying in order to obtain the powder(S2); and a step of manufacturing the oxide semiconductor type gas sensor having the porous nano hierarchical structure by processing with the heat after forming a film from the power(S4).