EXPOSURE SYSTEM OF MASKLESS TYPE USING DIGITAL MICROMIRROR DEVICE

摘要

An exposure system of the maskless mode DMD is provided, which can reduce the volume of the whole system by using only one light source regardless of the number of exposure engine. The exposure engine is equipped with the UV light source and DMD(digital micromirror device). The UV light source irradiates the light ray. The DMD reflects the light ray which is incident from the UV light source. The stage is arranged in the lower part of the exposure engine and moves in the cross direction for exposure. The 45 degrees reflection mirror(M1) reflects the light ray coming from the light source with the incident angle of 22.5 degrees and angle of reflection of 22.5 degrees. The cube type beam splitter(BS) separates the light ray in two directions. The 90 degrees reflection mirror makes the separated light ray incident in DMD of the exposure engine.