SURFACE-TEXTURED ZINC OXIDE BASED TRANSPARENT CONDUCTIVE THIN FILM HAVING DOUBLE LAYER STRUCTURE AND METHOD FOR PREPARTING THE SAME

摘要

A surface with double-layered structure and manufacturing method is textured to make surface have certain structure setting at resistance is reduced based on the transparent conductive film of zinc oxide by reactive sputtering, uses the mixed gas of inert gas and steam. First layer transparent conductive film (1) is laminated on a base material (3). Secondary oxidation zinc system transparent conductive film (2) is laminated on first layer transparent conductive film by reactive sputtering. First layer film is had a low resistance in second layer film. Second layer film is stacked by reactive sputtering, uses the processing gas containing steam and inert gas. Inert gas is argon (Ar).