TEMPERATURE SENSING DEVICE AND CHAMBER HAVING TEMPERATURE SENSING DEVICE TO REDUCE THE FAILURE RATE

摘要

PURPOSE: A temperature sensing device and chamber having temperature sensing device are provided to accurately measure the temperature required for the deposition process of a substrate.;CONSTITUTION: The temperature sensing device and chamber having temperature sensing device includes the chamber(100) for performing the deposition process of a substrate and the temperature measuring apparatus which measures the process space of the chamber and temperature of the substrate surface. The fixing unit(210) includes the fixing plate and is fixed at the upper of the chamber. The moving element(220) is combined to the post. The driving part(230) is prepared in the fixing unit. The temperature measuring part(240) measures the temperature of the inside of chamber.;COPYRIGHT KIPO 2010