MEASURING DEVICE, A MEASURING METHOD, AN EXPOSING DEVICE, AND A METHOD FOR MANUFACTURING A DEVICE, CAPABLE OF CONTROLLING A POSITION RELATION BETWEEN A SLIT AND AN AERIAL IMAGE PRECISELY

摘要

PURPOSE: A measuring device, a measuring method, an exposing device, and a method for manufacturing a device are provided to measure light intensity distribution of an aerial image through a slit by forming the aerial image on an image plane.;CONSTITUTION: A stage(60) moves a slit(54). A light receiving element(53) includes at least two light receiving units receiving the light for receiving the light through the slit. A memory memorizes a distance relation to maximize the intensity of the light receiving the light receiving element. An operation unit operates an angle using the relation memorized in the memory unit and the detection result by the light receiving element. A stage driver(80) rotates the stage to make the angle 0 using the angle operated by the operation unit. The light receiving element includes a pixel array arranged in one dimension.;COPYRIGHT KIPO 2010