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The air it will cut and thu combination drain valve and will reach and the drain system which it uses

机译:它将切断的空气与组合的排污阀通入并到达其使用的排污系统

摘要

In this invention, such as condensate drain valve and drain the device mainly used for air piping in the semiconductor manufacturing equipment so as to discharge the water without stopping the operation of the semiconductor manufacturing facility, while through the drain valve provided in the drain pipe so that the outside air is smooth so that it can be done by discharging the inlet for discharging the drain water, and superior performance in action exert on the air vent and as the drain valve and drain Combine apparatus using the improved so that cost reduction is achieved, as the drain device provided in the condensate collection reservoir (2) of the air duct (1); The condensate collection reservoir (2), drain (3) is provided fixedly to the lower side, the beam of the drain pipe (3), the inlet 111 and outlet 112, the valve body with a 110 olhoe pupil 113 in the knob 140 and the inlet closing portion 122 and the other end of the bowl 120 is rotated and the opening 121, the bowl (120) having on both sides with the opening 121 by the associated beam olchuk 130 closing the outlet portion 123 has vent holes 124 by closing the inlet section 122 is formed above the inlet 111 is in the shielded state opening 121 in line with the valve body which is located in a position ( 110) The beam olhoe pupil 113 and through the air inlet hole 115 is formed to be composed of an air vent Combine drain valve 100 is installed, and so that the drain pipe (3) is opened and closed, the air vent drain valve combine (100 ) of the outlet (112), the condensed water (w) long house water tube (4) is provided which has sump, olhoe beam of the home water tube 4 is provided with inlet 12 and outlet 13 with a valve body 11 cavity 14 in the handle 15 and the bowl 18, with opening 17 by the associated beam olchuk 16 drain valve is opened and closed the pivot (10) is provided, wherein the drain valve (10 ) of the outlet (13) to the drain pipe (5) when closing the air vent to combine the drain valve 100 is the drain pipe (3) is provided and opens the drain valve 10, the air inlet hole 115 and vent 124 outside the house air hose (4) to provide a drain valve and a drain unit that flows into the air vent formed through the combination.
机译:在本发明中,例如通过冷凝水排水阀,通过设置在排水管中的排水阀,使半导体制造设备中主要用于空气管道的装置排水,以在不停止半导体制造设备的操作的情况下排放水而不会停止半导体制造设备的运行。外部空气是光滑的,因此可以通过排放用于排放排水的入口来完成,并且在排气口上发挥了出色的作用,并且由于采用了改进的排水阀和排水联合装置,因此可以降低成本,作为设置在风道(1)的冷凝水收集槽(2)中的排水装置。冷凝水收集容器(2),排水管(3)固定设置在下侧,排水管(3)的横梁,入口111和出口112,阀体以及在旋钮140中带有110孔的光瞳113并且入口封闭部122和碗120的另一端旋转,并且开口121,碗(120)在开口121的两侧具有由相关联的梁olchuk 130封闭的出口部123,其具有通气孔124入口111的上方形成有封闭入口部122的封闭状态,开口121处于与位于位置(110)的阀体成一直线的遮蔽状态。光束olol瞳孔113和通过进气孔115而构成安装排气组合排水阀100的一部分,以打开和关闭排水管(3),出口(112)的排气组合排水阀(100),冷凝水(w),长屋用水设置有集水管的管(4),在自来水管4的梁上设置有入口12和出口13具有阀体11,腔体14位于手柄15和便池18中,具有通过相关联的开口olchuk 16打开和关闭排水阀16的枢轴(10),其中排水阀(10) )的出口(13)排到排水管(5)时,关闭排气孔以结合排水阀100是设置的排水管(3)并打开排水阀10,将进气孔115和排气孔124外部房屋空气软管(4),以提供一个排水阀和一个排水单元,该排水单元和排水单元流入通过组合形成的通风口。

著录项

  • 公开/公告号KR100878450B1

    专利类型

  • 公开/公告日2009-01-13

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20070045814

  • 发明设计人 성열학;

    申请日2007-05-11

  • 分类号F16K5/06;F16K24/00;F16K24/04;

  • 国家 KR

  • 入库时间 2022-08-21 19:12:17

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