SUBSTRATE SUPPORTER HAVING A EMBOSSED PATTERN AND METHOD OF MANUFACTURING THEREOF

摘要

and a method of manufacturing a substrate support having an embossing pattern is disclosed . The substrate support comprises a coating layer covering the body and the projection including a protrusion integrally projecting from the surface . Projections that forms a coating layer forming a plurality of projections , and the projections on the substrate covering the support has a semi-spherical or conical shape in the manufacturing method of the substrate support the substrate support is formed integrally .