DEVICE FOR STUDYING THE STRUCTURE OF PERFECTION crystalline layers

摘要

An apparatus for investigating perfect structure of the crystal layers, comprising in sequence the X-ray source means monochromatization and collimation of X-rays, the object under study with rotation means, the first energy analyzer, a first electron detector and the X-ray detector, and the examined object, the first energy analyzer and a first electron detector kinematically linked first axis with each other and arranged in the vacuum chamber of the analyzer is aligned with surface of the test object, and the energy analyzer focus is aligned with the region of the x-ray diffraction reflections, characterized in that, in order to increase the accuracy and rapidity of analysis, the device is further provided with a second detector electrons second energy analyzer placed in the vacuum chamber axially with the first energy analyzer and kinematically linked with a test object and the second electron detector, wherein znergoanalizatorov used as energy analyzers spherical mirror, Oecussi are combined, and the electron detectors are arranged on the surfaces of spherical internal electrodes of the first and second energy analyzers at points diametrically opposite the focal point.