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Method and system for removing empty carrier containers of process plants by controlling an association between control tasks and carrier containers
Method and system for removing empty carrier containers of process plants by controlling an association between control tasks and carrier containers
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机译:通过控制控制任务与载体容器之间的关联来移除加工厂的空载体容器的方法和系统
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摘要
By providing a minimized specification for designating a destination container in a corresponding control task or control message, a high degree of flexibility in determining the destination of processed substrates can be achieved, thereby also enabling the removal of a source container, thereby increasing the availability of charging stations in complex semiconductor manufacturing facilities improve.
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