Method for the interferometric determination of an optical wavelength between the surface of an object and a reference surface comprises directing the coherent electromagnetic wave front onto the surface of the object

摘要

Method for the interferometric determination of an optical wavelength between the surface (P) of an object (O) and a reference surface (R) comprises directing the coherent electromagnetic wave front onto the surface of the object at a small angle (alpha ) to the optical axis (6). An independent claim is also included for an interferometer arrangement. Preferred Features: The reference surface is formed as a planar surface. The method is carried out in a common-path arrangement. The coherent electromagnetic wave front is monochromatic.