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Device for adjusting lamp in incident light system, has incident light illuminating beam path and detecting beam path running conjointly and parallely in section of incident light system with optical element

机译:入射光系统中的灯的调整装置,具有入射光照明光路和检测光路,在入射光系统的截面中与光学元件连动地平行

摘要

The device has an aperture diaphragm (11) arranged in an incident light illuminating beam path (5). A detector (16) is arranged in a detecting beam path (7) of an incident light system (1). The incident light illuminating beam path and the detecting beam path run conjointly and parallely in a section (6) of the incident light system. An optical element is positioned in the section of the system, where the optical element illustrates the aperture diaphragm on the detector.
机译:该装置具有布置在入射光照明光束路径(5)中的孔径光阑(11)。在入射光系统(1)的检测光束路径(7)中布置有检测器(16)。入射光照明光束路径和检测光束路径在入射光系统的部分(6)中共同且平行地延伸。光学元件位于系统的该部分中,该光学元件示出了检测器上的孔径光阑。

著录项

  • 公开/公告号DE102007046601A1

    专利类型

  • 公开/公告日2009-04-02

    原文格式PDF

  • 申请/专利权人 VISTEC SEMICONDUCTOR SYSTEMS GMBH;

    申请/专利号DE20071046601

  • 发明设计人 SULIK WOLFGANG;DANNER LAMBERT;

    申请日2007-09-27

  • 分类号G02B21/06;

  • 国家 DE

  • 入库时间 2022-08-21 19:09:34

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