Acceleration sensor, has micromechanical functional part arranged over substrate, where functional part is fastened to substrate by two torsion springs over common hanging part that is fastened to substrate by two anchors

摘要

The sensor has a micromechanical functional part (20) arranged over a substrate (10), where the functional part is fastened to the substrate by two torsion springs (30) over a common hanging part (40). The common hanging part is fastened to the substrate by two anchors (62, 64). Two electrodes (52, 54) are arranged on the substrate between the functional part and the substrate, where each of the electrodes has a centroid. The anchors are fastened to the centroids of the electrodes at the substrate.