Nano probes tip for progressive scanning probe microscopy with a layer of probes material which, by means of lithography and / or by ions jet techniques is structured

摘要

By forming a suitable material layer, for example of a metal-containing material, on a suitable substrate and patterning the layer of material, in such a way that a lever arm region and a tip area is to be provided, can be specially shaped nano probes are obtained. In some illustrative embodiments, in addition a three-dimensional templates structure before the deposition of the probes material is created, whereby the forming sophisticated extending on the basis of lithography is possible, as an alternative or in addition, other material removal processes with high spatial resolution, approximately fib - a method for forming of nano probes, can be used for the measurements with electrical interaction and high resolution temperature and the like can be used. Thus, demanding measurement techniques for measuring techniques for thermal probe, the deformation measurement and the like are arranged, in which a thermal and / or electrical interaction with the observed surface is required. These techniques can be advantageous for the fault location and local analysis during the manufacture of modern integrated circuits are used.